JPH085547Y2 - 縦型拡散装置 - Google Patents
縦型拡散装置Info
- Publication number
- JPH085547Y2 JPH085547Y2 JP1988030852U JP3085288U JPH085547Y2 JP H085547 Y2 JPH085547 Y2 JP H085547Y2 JP 1988030852 U JP1988030852 U JP 1988030852U JP 3085288 U JP3085288 U JP 3085288U JP H085547 Y2 JPH085547 Y2 JP H085547Y2
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- pedestal
- packing
- receiving plate
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009792 diffusion process Methods 0.000 title claims description 6
- 238000012856 packing Methods 0.000 claims description 35
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 26
- 235000012431 wafers Nutrition 0.000 claims description 18
- 239000000498 cooling water Substances 0.000 claims description 16
- 239000010453 quartz Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 238000005260 corrosion Methods 0.000 claims description 11
- 230000007797 corrosion Effects 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 17
- 238000001816 cooling Methods 0.000 description 5
- 238000003825 pressing Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 239000012495 reaction gas Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988030852U JPH085547Y2 (ja) | 1988-03-07 | 1988-03-07 | 縦型拡散装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988030852U JPH085547Y2 (ja) | 1988-03-07 | 1988-03-07 | 縦型拡散装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01133728U JPH01133728U (en]) | 1989-09-12 |
| JPH085547Y2 true JPH085547Y2 (ja) | 1996-02-14 |
Family
ID=31256273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988030852U Expired - Lifetime JPH085547Y2 (ja) | 1988-03-07 | 1988-03-07 | 縦型拡散装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH085547Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5535740B2 (ja) * | 2010-04-14 | 2014-07-02 | 三菱重工業株式会社 | 熱媒体加熱装置およびそれを用いた車両用空調装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61100141U (en]) * | 1984-12-07 | 1986-06-26 | ||
| JPS62166624U (en]) * | 1986-04-14 | 1987-10-22 | ||
| JP2502977B2 (ja) * | 1986-04-18 | 1996-05-29 | 株式会社日立製作所 | 熱処理装置 |
| JPS63161610A (ja) * | 1986-12-25 | 1988-07-05 | Toshiba Ceramics Co Ltd | ウエ−ハボ−ト |
-
1988
- 1988-03-07 JP JP1988030852U patent/JPH085547Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01133728U (en]) | 1989-09-12 |
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